碳纳米管
化学气相沉积
材料科学
化学工程
碳纳米管负载催化剂
图层(电子)
沉积(地质)
等离子体增强化学气相沉积
等离子体
催化作用
碳纤维
纳米技术
扩散
复合材料
化学
碳纳米纤维
有机化学
古生物学
物理
热力学
量子力学
沉积物
生物
复合数
工程类
作者
M. Chhowalla,K. B. K. Teo,Caterina Ducati,N.L. Rupesinghe,G. A. J. Amaratunga,Andrea C. Ferrari,Debdulal Roy,John Robertson,W. I. Milne
摘要
The growth of vertically aligned carbon nanotubes using a direct current plasma enhanced chemical vapor deposition system is reported. The growth properties are studied as a function of the Ni catalyst layer thickness, bias voltage, deposition temperature, C2H2:NH3 ratio, and pressure. It was found that the diameter, growth rate, and areal density of the nanotubes are controlled by the initial thickness of the catalyst layer. The alignment of the nanotubes depends on the electric field. Our results indicate that the growth occurs by diffusion of carbon through the Ni catalyst particle, which rides on the top of the growing tube.
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