时域有限差分法
电子束光刻
光学
材料科学
光束传播法
波导管
平版印刷术
绝缘体上的硅
插入损耗
能量转换效率
光刻
硅
光电子学
折射率
物理
抵抗
图层(电子)
复合材料
作者
Jinghui Zou,Yu Yu,Mengyuan Ye,Lei Liu,Shuanghui Deng,Xiaogeng Xu,Xinliang Zhang
出处
期刊:Optics Letters
[The Optical Society]
日期:2014-10-23
卷期号:39 (21): 6273-6273
被引量:36
摘要
We present an efficient segmented-stepwise method to design a short and low-loss mode-size converter. A silicon-on-insulator platform-based converter with 20 μm length and 95.2% conversion efficiency is acquired by taking only 10 optimization generations using 2D-FDTD method. A 3D-FDTD simulation is performed to verify the calculated results, returning an efficiency of 92.1%. The proposed device can be used to connect a 12-μm-wide waveguide and a 0.5-μm-wide single-mode waveguide, with comparable performance of a regular scheme using 150-μm-long linear taper. For demonstration, the converter was fabricated by electron-beam-lithography and inductively-coupled-plasma etching. A conversion loss of -0.62±0.02 dB at 1550 nm was experimentally measured.
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