光学
聚光镜(光学)
显微镜
衍射
材料科学
分辨率(逻辑)
光圈(计算机存储器)
光学显微镜
显微镜
数值孔径
摄影术
物理
扫描电子显微镜
波长
光源
人工智能
计算机科学
声学
作者
Arnold Vainrub,Oleg Pustovyy,Vitaly Vodyanoy
出处
期刊:Optics Letters
[The Optical Society]
日期:2006-09-11
卷期号:31 (19): 2855-2855
被引量:114
摘要
Resolution of 90 nm was achieved with a research microscope simply by replacing the standard bright-field condenser with a homebuilt illumination system with a cardioid annular condenser. Diffraction gratings with 100 nm width lines as well as less than 100 nm size features of different-shaped objects were clearly visible on a calibrated microscope test slide. The resolution increase results from a known narrower diffraction pattern in coherent illumination for the annular aperture compared with the circular aperture. This explanation is supported by an excellent accord of calculated and measured diffraction patterns for a 50 nm radius disk.
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