Solution-Processed LiNbO3 Thin Film as a Gate Dielectric of a Ferroelectric Thin Film Transistor
铁电性
电介质
材料科学
光电子学
作者
Rajarshi Chakraborty,Nila Pal,Bhola N. Pal
标识
DOI:10.1109/icee56203.2022.10117799
摘要
An ideal ferroelectric gate dielectric based thin film transistor (FeTFT) can offer a memory device of random access, high speed, low power, high density and nonvolatility. Lithium niobate (LiNbO 3 ) being a well-known ferroelectric material, but its implementation in FeTFT has not been explored much. This work is reporting a methodology of LiNbO 3 based FeTFT device fabrication by solution processed technique. The carrier mobility of 9.6 cm 2 V -1 s -1 and current ON/OFF ratio of 1.9x10 3 are attained with this LiNbO 3 ferroelectric gate dielectric based FeTFT device. This work also demonstrates a reasonably good memory retention time of a ferroelectric thin film transistor.