AlGaN-Based Deep Ultraviolet Vertical-Cavity Surface-Emitting Laser

An optically pumped AlGaN-based vertical-cavity surface-emitting laser (VCSEL) in the deep ultraviolet (DUV) range (<; 280 nm) is demonstrated. The lasing wavelength is 275.91 nm with a threshold power density of 1.21 MW/cm ² and a linewidth of 0.78 nm. The lasing is believed to be benefited from high internal quantum efficiency (IQE) of the AlGaN-based multiple quantum wells (MQWs) and improved fabrication processes.