外延
材料科学
范德瓦尔斯力
图层(电子)
表征(材料科学)
分子束外延
光电子学
薄膜
纳米技术
化学
分子
有机化学
作者
Hyunseok Kim,Celesta S. Chang,Sangho Lee,Jie Jiang,Junseok Jeong,Minseong Park,Yuan Meng,Jongho Ji,Yeunwoo Kwon,Xuechun Sun,Wei Kong,Hyun Kum,Sang‐Hoon Bae,Kyusang Lee,Young Joon Hong,Jian Shi,Jeehwan Kim
标识
DOI:10.1038/s43586-022-00122-w
摘要
Remote epitaxy is an emerging technology for producing single-crystalline, free-standing thin films and structures. The method uses 2D van der Waals materials as semi-transparent interlayers that enable epitaxy and release of epitaxial layers at the 2D layer interface. Although the principle of remote epitaxy is simple, it is often challenging to perform owing to stringent requirements for sample preparation and procedure control. This Primer provides extensive guidelines on remote epitaxy techniques, from preparing 2D materials to epitaxy processes and layer transfer methods. Depending on the material of interest, the procedure used can vary, which affects the quality. Consequently, in this Primer, key considerations and characterization techniques are provided for respective families of materials. These are intended as a stepping stone to expand the available material choice and improve the quality of materials grown by remote epitaxy. Lastly, the current limitations, possible solutions and future directions of remote epitaxy and its applications are discussed.
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