薄膜晶体管
光电子学
有源矩阵
晶体管
材料科学
氧化物薄膜晶体管
有机发光二极管
有机场效应晶体管
栅极电介质
电气工程
场效应晶体管
工程类
纳米技术
电压
图层(电子)
标识
DOI:10.1002/9781119187493.ch6
摘要
This chapter discusses thin-film transistor (TFT) technologies for active-matrix driving and the organic light-emitting diode (OLED) backplane, using a top-gate TFT structure. It shows transistor behavior in linear region operation. A transistor that switches on and off depending on the gate electrode potential is called a field effect transistor (FET). Especially, an FET whose channel conductance is modulated by the gate electrode placed across the dielectric layer is called a metal oxide semiconductor field effect transistor (MOSFET). An OLED device is driven by electric current, and to satisfy the luminance specification with respect to visibility in ambient environment conditions, a large current is necessary. The chapter explains the TFT characteristics necessary for this purpose. There are many difficulties with the low-temperature polysilicon (LTPS)-TFT formation process using excimer laser annealing (ELA), such as laser stability, TFT performance variation, poor laser process productivity, and lack of substrate size scalability. The chapter considers new approaches to these issues.
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