材料科学
氧化物
薄膜
可扩展性
激光器
纳米技术
光电子学
化学工程
冶金
计算机科学
光学
工程类
物理
数据库
作者
Licong An,Danilo de Camargo Branco,Xingtao Liu,Haoqing Jiang,Mingyi Wang,Jin Xu,Ruifang Zhang,Wenzhuo Wu,Gary J. Cheng
出处
期刊:Matter
[Elsevier]
日期:2023-04-01
卷期号:6 (4): 1203-1216
被引量:1
标识
DOI:10.1016/j.matt.2023.01.021
摘要
Two-dimensional metal oxides are gathering emerging focus as the next-generation semiconductor due to their unique electric properties. Room temperature liquid metal is promising for fabricating metal oxide thin films; however, making them into electronics remains a challenge. Here, we report an advanced technique, confined laser transfer printing (CLTP), to create large-scale uniform gallium oxide thin film patterns from liquid metals. The process mechanism is mainly attributed to the pulsed laser-induced recoil force to generate uniform liquid metal patterns with oxide on their skin, followed by instant transfer of oxide nanolayer from the liquid metal skin to the top confinement due to strong van der Waals force. We also found that the electrical properties of the thin films are tunable by the thicknesses produced during CLTP. This technology shows great versatility and scalability for a variety of metal oxide thin films and is promising to integrate metal oxide thin films into advanced electronic components.
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