Introduction of the MC3-II/GP system, medium current ion implanter with enhanced multi-charge beam current

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Masazumi Koike, Fumiaki Sato, Makoto Sano, Sho Kawatsu, Hiroyuki Kariya, Yasuhiko Kimura, Tetsuya Kudo, Miyuki Shiraishi, Masamitsu Shinozuka, Yuji Takahashi, Yuji Ishida, Mitsukuni Tsukihara, Kazuyoshi Ueno, Michiro Sugitani; Introduction of the MC3-II/GP system, medium current ion implanter with enhanced multi-charge beam current. AIP Conference Proceedings 6 November 2012; 1496 (1): 336–339. https://doi.org/10.1063/1.4766557 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioAIP Conference Proceedings Search Advanced Search |Citation Search