飞秒
材料科学
硅
激光器
领域(数学)
相(物质)
工作(物理)
扩散
灵敏度(控制系统)
热的
傅里叶变换
光学
光电子学
物理
电子工程
热力学
数学
工程类
量子力学
纯数学
作者
Linan Zhang,Kai Lu,Liqun Wu,Hongcheng Wang,Hongying Liu,Chao Chen
标识
DOI:10.1088/2053-1591/ac7bd9
摘要
Abstract In this paper, phase field model is employed to simulate the process of femtosecond laser which irradiates on silicon surface. The numerical model is mainly used to study the micro/nano evolution process and the atomic diffusion motion of the system. Meanwhile, the Semi-Implicit Fourier spectral method and Semi-Implicit Backwards Differentiation Formula are applied for high efficiency and numerical stability. Further, the rules of surface bumps are controlled by different thermal conductivities which are systematically revealed. Our work provides a new prospect for fabricating the bumps of the probe, to obtain high sensitivity sensors in chemical and biological fields.
科研通智能强力驱动
Strongly Powered by AbleSci AI