覆盖
计量学
多目标优化
稳健性(进化)
计算机科学
遗传算法
过程(计算)
优化设计
算法
数学优化
光学
数学
物理
程序设计语言
化学
机器学习
操作系统
基因
生物化学
作者
Yating Shi,Kuangyi Li,Xiuguo Chen,Peng Wang,Honggang Gu,Hao Jiang,Chuanwei Zhang,Shiyuan Liu
出处
期刊:Applied Optics
[The Optical Society]
日期:2020-03-18
卷期号:59 (9): 2897-2897
被引量:7
摘要
Overlay target design is an important issue in overlay metrology, whose aim is to probe the optimal overlay target to achieve good performance on measurement precision and accuracy even in the presence of process variation. In this paper, the target design problem is first formulated as a multiobjective optimization problem and then solved by the multiobjective genetic algorithm. The feasibility of the proposed method is verified based on simulations carried out on two overlay targets. The results reveal that measurements with high precision, accuracy, and process robustness could be achieved on the targets designed by the proposed method.
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