材料科学
光电子学
分离(微生物学)
断层(地质)
氧化物
砷化镓
电子工程
工程类
地质学
冶金
生物
微生物学
地震学
作者
Kuang-Tse Ho,Ching‐Hsiang Chan
出处
期刊:Proceedings
日期:2020-12-01
标识
DOI:10.31399/asm.cp.istfa2020p0317
摘要
Abstract This research summarizes a variety of physical failure modes of GaAs-based oxide-confined VCSELs and their root causes. Standard failure analysis procedure, which includes defect fault isolation by PEM or IR-OBIRCH and physical inspection by TEM analysis are also presented in detail.
科研通智能强力驱动
Strongly Powered by AbleSci AI