Novel bolometric THz detection by MEMS resonators

We have developed an uncooled, sensitive, and fast THz bolometer by using a doubly clamped GaAs MEMS beam resonator as a sensitive thermistor. Owing to its ultra-high temperature sensitivity, the present bolometer achieves not only a high sensitivity but also an operation bandwidth of several kHz, which is ~100 times faster than other uncooled THz thermal sensors. The obtained electrical noise equivalent power (NEP) is as low as ~ 20pW/√Hz, which is close to the limit set by the thermal fluctuation noise. The MEMS bolometers are fabricated by the standard semiconductor fabrication processes and are well suited for making detector arrays for realizing THz cameras.