石墨
坩埚(大地测量学)
温度梯度
材料科学
晶体生长
多孔性
碳化物
碳纤维
热电效应
制作
晶粒生长
碳化硅
矿物学
微下拉
硅
冶金
复合材料
结晶学
化学
微观结构
复合数
热力学
计算化学
病理
替代医学
物理
医学
量子力学
作者
Sakiko Kawanishi,Hironori Daikoku,Hiroyuki Shibata,Takeshi Yoshikawa
标识
DOI:10.1016/j.jcrysgro.2021.126382
摘要
To develop a long-term and stable growth technology for the solution growth of silicon carbide (SiC), the use of the newly fabricated SiC/C gradient crucible was studied. The fabrication of the SiC/C gradient structure was achieved by a two-step heat treatment, and a SiC/C structure with a high SiC areal ratio of more than 50% was obtained by Si infiltration into the porous graphite. Then, the top-seeded solution growth was performed using the fabricated SiC/C gradient crucible that revealed the suppression of the compositional change of the solution during the growth in comparison to the growth using a graphite crucible, which is the general method for the SiC solution growth. Furthermore, the SiC growth behaviors and crystal qualities were maintained when the SiC/C gradient crucible was used instead of the graphite crucible. The use of such a high-purity SiC/C gradient crucible was thus found to be effective in achieving crystal growth with less compositional change, which would enable long-term growth while maintaining a stable growth interface.
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