Intra field CD uniformity correction by Scanner Dose Mapper using Galileo mask transmission mapping as the CDU data source

十字线 扫描仪 计算机科学 薄脆饼 视野 传输(电信) 全球导航卫星系统应用 光学 计算机视觉 人工智能 全球定位系统 物理 电信 光电子学
作者
Gek Soon Chua,Chason Eran,Sia Kim Tan,Byoung Il Choi,Teng H. Ng,Poh Ling Lua,Ofir Sharoni,Guy Ben-Zvi
出处
期刊:Proceedings of SPIE 卷期号:7640: 76402U-76402U 被引量:1
标识
DOI:10.1117/12.852819
摘要

Intra-field CD variation can be corrected through wafer CD feedback to the scanner in what is called the Dose Mapper (DOMA) process. This will correct errors contributed from both reticle and scanner processes. Scanner process errors include uncorrected illumination non uniformities and projection lens aberration. However, this is a tedious process involving actual wafer printing and representative CD measurement from multiple sites. A novel method demonstrates that measuring the full-field reticle transmission with Galileo® can be utilized to generate an intensity correction file for the scanner DOMA feature. This correction file will include the reticle transmission map and the scanner CD signature that has been derived in a preliminary step and stored in a database. The scanner database is periodically updated after preventive maintenance with CD from a monitoring reticle for a specific process. This method is easy to implement as no extra monitoring feature is needed on the production reticle for data collection and the new reticle received can be immediately implemented to a production run without the need for wafer CD data collection. Correlation of the reticle transmission and wafer CD measurement can be up to 90% depending on the quality of CD data measurements and repeatability of the scanner signature. CD mapping on the Galileo® tool takes about 20 minutes for 1500 data points (there is no limit to the number of measurement point on the Galileo®), which is more than enough for the DOMA process. Turn Around Time (TAT) for the whole DOMA process can thus be shortened from 3 Days to about an hour with significant savings in time and resources for the fab.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
20011013完成签到 ,获得积分10
刚刚
iNk应助微微采纳,获得10
刚刚
1秒前
1秒前
飞乐扣完成签到 ,获得积分10
2秒前
粗暴的君浩完成签到,获得积分10
2秒前
在水一方应助emm采纳,获得10
3秒前
6秒前
高文琴完成签到,获得积分10
6秒前
量子星尘发布了新的文献求助10
6秒前
monoklatt发布了新的文献求助10
7秒前
查查完成签到,获得积分10
7秒前
8秒前
必中发布了新的文献求助10
8秒前
所所应助jiang采纳,获得10
9秒前
李健应助HelloKun采纳,获得10
10秒前
晚风完成签到,获得积分10
10秒前
10秒前
默默雅阳发布了新的文献求助10
11秒前
勤恳的不二完成签到,获得积分10
11秒前
FashionBoy应助狂野忆文采纳,获得10
12秒前
hx完成签到,获得积分10
12秒前
SciGPT应助狂野忆文采纳,获得10
12秒前
小马甲应助狂野忆文采纳,获得10
12秒前
单薄的夜南应助狂野忆文采纳,获得10
12秒前
water应助狂野忆文采纳,获得10
12秒前
water应助狂野忆文采纳,获得10
12秒前
water应助狂野忆文采纳,获得10
12秒前
water应助狂野忆文采纳,获得10
12秒前
water应助狂野忆文采纳,获得10
12秒前
emm发布了新的文献求助10
12秒前
黑虎发布了新的文献求助10
13秒前
13秒前
研友_VZG64n完成签到,获得积分10
13秒前
13秒前
是萱萱鸭完成签到,获得积分10
15秒前
楠LEE发布了新的文献求助10
15秒前
16秒前
科研通AI2S应助科研通管家采纳,获得10
17秒前
17秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Technical Brochure TB 814: LPIT applications in HV gas insulated switchgear 1000
Toward a Combinatorial Approach for the Prediction of IgG Half-Life and Clearance 500
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
Picture Books with Same-sex Parented Families: Unintentional Censorship 500
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3969940
求助须知:如何正确求助?哪些是违规求助? 3514642
关于积分的说明 11175298
捐赠科研通 3249947
什么是DOI,文献DOI怎么找? 1795178
邀请新用户注册赠送积分活动 875617
科研通“疑难数据库(出版商)”最低求助积分说明 804891