Designing wearable capacitive pressure sensors with arrangement of porous pyramidal microstructures

电容感应 电容 灵敏度(控制系统) 材料科学 对角线的 电介质 多孔性 有限元法 压力传感器 声学 微观结构 信号(编程语言) 可穿戴计算机 电子工程 光电子学 复合材料 电气工程 计算机科学 几何学 机械工程 结构工程 工程类 电极 数学 物理 量子力学 嵌入式系统 程序设计语言
作者
Reza Javidi,Mahdi Moghimi Zand,Sara Alizadeh Majd
出处
期刊:Micro and Nano Systems Letters [Springer Science+Business Media]
卷期号:11 (1) 被引量:7
标识
DOI:10.1186/s40486-023-00178-7
摘要

Abstract Capacitive pressure sensors are essential for advanced applications like wearable medical devices, electronic skins, and biological signal detection systems. Enhancing sensitivity in these sensors is achieved by incorporating porous microstructures into the dielectric layer. The present research focuses on designing a capacitive pressure sensor comprising a porous micro-pyramidal dielectric layer featuring diagonally arranged pyramids. The effects of geometric parameters and material properties such as dielectric constant, porosity, base length, tip width, height, and the distance between the pyramidal microstructures were examined using the three-dimensional finite element simulations. A comparative analysis was conducted to evaluate the accuracy of the numerical solution. The simulation results were compared to experimental measurements, and the findings revealed a high level of agreement. The optimal quantity of data for this analysis was determined using the design of the experiment method, specifically the response surface model. The results show that arranging microstructures diagonally or laterally can impact sensitivity and initial capacitance. Specifically, employing a diagonal arrangement enhanced sensor sensitivity by up to 1.65 times while maintaining the initial capacitance relatively unaffected. Ultimately, this study derived mathematical equations from the collected data to estimate the initial capacitance and sensitivity of the sensor. The model predictions were compared to simulation results, and it was found that the models performed effectively.
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