5 GHz Shear-Horizontal Wave Micro-Mass Sensing

声表面波 灵敏度(控制系统) 材料科学 声表面波传感器 声学 瑞利波 光电子学 附加质量 表面波 光学 电子工程 工程类 物理 振动
作者
Shengyu Wen,Jian Zhou,Jinbo Zhang,Hui Chen,Zhangbin Ji,Yiqin Chen,Huigao Duan
出处
期刊:IEEE Sensors Journal [IEEE Sensors Council]
卷期号:24 (5): 5998-6005 被引量:2
标识
DOI:10.1109/jsen.2024.3351151
摘要

Surface acoustic wave (SAW) micro-mass sensors have garnered significant attention due to their versatile applications in medical measurements, industrial production quality control, and environmental pollution monitoring. Traditional devices of this kind often grapple with the predicament of operating at low frequencies, typically below 2 GHz, and relying on the Rayleigh sensing mode. This can undermine their capability for highly sensitive detection. Herein, we present the manufacture and application of a high frequency SAW micro-mass sensor based on a LiTaO3/SiO2/Si heterostructure, demonstrating superior frequency capability in the range of 1~10 GHz, achieved through electron beam lithography. Different acoustic modes and their micro-mass sensitivity were thoroughly analyzed using finite element analysis, revealing that the shear-horizontal (SH) wave exhibited a superior performance and the highest mass-sensitivity among the analyzed modes, which was also convinced with the experiments. To evaluate the exceptional sensing ability, the SH wave (up to ~5 GHz) was successfully implemented in SAW micro-mass sensor for Al film and SiO2 film micro-mass detection, exhibiting an ultra-mass sensitivity of 14370 MHz2/μg and 13181.8 MHz2/μg, respectively. In a smoke concentration detection application, the high frequency SAW devices (4.83 GHz) exhibited a sensitivity approximately 129 times higher than that of low frequency SAW devices (195.5 MHz) in the same testing environment, verifying the advantages of high sensitivity. This study introduces a viable strategy for constructing high-sensitivity surface acoustic wave (SAW) micro-mass sensors.
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