Laser Micronanofabrication

This chapter focuses on laser nanofabrication, that is, neither measurement nor mass production, but rather the ability to achieve direct laser etching at a scale smaller than 1 ॖm. It begins with four recent key technologies that have clearly shown the possibility of scaling down the laser machining process: the femtosecond laser source, the nondivergent Bessel beam, the photonic nanojet, and the laser-induced forward transfer (LIFT). Then, the chapter focuses on to the more relevant performances achieved for the elementary processes such as material deposition, microdrilling, microcutting, laser welding, surface texturing, additive manufacturing, and waveguide writing. Recent advances have made possible the downsizing of objects achieved by laser fabrication. The improvements come from sources, beam shaping techniques, and specific processes. With the expected decrease in laser source prize, direct laser nanofabrication technique will become a promising alternative flexible tool for prototyping if not for mass production.