材料科学
超短脉冲
材料加工
激光器
激光束
光电子学
梁(结构)
沉积(地质)
计算机科学
光学
物理
工程类
工艺工程
沉积物
生物
古生物学
作者
Daniel Flamm,Felix Zimmermann,Myriam Kaiser,Daniel Großmann,Keyou Chen,Michael Jenne,Jonas Kleiner,Malte Kumkar
出处
期刊:Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series
日期:2020-03-02
被引量:2
摘要
Ultrashort pulsed lasers represent unique tools for the processing of micro-optical components. Pulse durations around 1 ps and corresponding extreme peak intensities lead to interaction processes with all conceivable materials. As parts of almost every optoelectronic device, transparent materials represent a particularly challenging example for processing. Here, a controlled energy deposition at the surface or inside the volume is required while maintaining optical properties or implemented functionalities of adjacent areas. The talk will review strategies for the micro-processing of transparent materials that become possible by spatiotemporal beam shaping. Here, the beneficial use of non-diffracting beams is discussed as well as 3D-beam splitting approaches.
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