抛光
材料科学
沟槽(工程)
磨料
光学
表面粗糙度
化学机械平面化
表面光洁度
振动
菲涅耳区
菲涅耳方程
干涉测量
光电子学
复合材料
折射率
物理
声学
冶金
衍射
作者
Jun Guo,Henry Jia Hua Jong,Renke Kang,Dongming Guo
出处
期刊:Optics Express
[The Optical Society]
日期:2018-04-20
卷期号:26 (9): 11608-11608
被引量:23
摘要
This paper presents a new localized vibration-assisted magnetic abrasive polishing (VAMAP) method using loose abrasives for V-groove and Fresnel optics finishing. The purpose is to improve the surface quality while maintaining the form of the microfeatures. This method allows abrasives to access the corners of the microfeatures and remove materials locally and uniformly by effectively controlling the magnetic field and vibration which overcomes the limitations of previous research. By using loose abrasives, the method achieved nanometer level surface roughness and damage-free surface while maintaining the form of the microfeatures. The results show that the surface roughness was reduced to about 7 nm Ra from the initial value of over 10 nm Ra while the microfeatures of V-groove and Fresnel optics were well maintained. At the same time, the surface defects including voids, scratches as well as tool marks were clearly removed.
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