电容感应
聚二甲基硅氧烷
材料科学
压力传感器
电极
制作
软机器人
触觉传感器
平面的
机器人学
纳米技术
光电子学
计算机科学
电子工程
电气工程
机器人
机械工程
人工智能
工程类
医学
化学
替代医学
计算机图形学(图像)
物理化学
病理
作者
Mani Teja Vijjapu,Sherjeel M. Khan,Syed Hassaan Abdullah,Manoj Jose,Johanna Zikulnig,Lukas Rauter,Lisa-Marie Faller,Jürgen Kosel
标识
DOI:10.1109/apscon56343.2023.10101193
摘要
Pressure sensors are among the most widely used devices to collect quantitative feedback during physical interactions of mechanical systems, especially in robotics. In this work, we demonstrate flexible interdigitated capacitive pressure sensors using polydimethylsiloxane (PDMS) as pressure sensitive layer. Furthermore, we investigate the possibility to enhance the sensitivity of the sensors using a PDMS composite with nanoparticles that exhibit a high dielectric permittivity. The interdigitated electrodes are screen-printed and planar. The interdigitated electrode configuration eases the fabrication process flow compared to parallel-plate capacitive sensors, where the electrodes must be deposited twice, and in different layers. Thus, the developed sensors simplify integration and are suitable for a wide range of applications, paving the way towards cost effective flexible pressure sensors.
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