压阻效应
材料科学
压力传感器
灵敏度(控制系统)
纳米技术
触觉传感器
氮化物
光电子学
计算机科学
电子工程
机器人
机械工程
人工智能
工程类
图层(电子)
作者
Yongfa Cheng,Yanan Ma,Luying Li,Meng Zhu,Yue Yang,Weijie Liu,Longfei Wang,Shuangfeng Jia,Chen Li,Tianyu Qi,Jianbo Wang,Yihua Gao
出处
期刊:ACS Nano
[American Chemical Society]
日期:2020-02-10
卷期号:14 (2): 2145-2155
被引量:385
标识
DOI:10.1021/acsnano.9b08952
摘要
Recently, wearable and flexible pressure sensors have sparked tremendous research interest, and considerable applications including human activity monitoring, biomedical research, and artificial intelligence interaction are reported. However, the large-scale preparation of low-cost, high-sensitivity piezoresistive sensors still face huge challenges. Inspired by the specific structures and excellent metal conductivity of a family of two-dimensional (2D) transition-metal carbides and nitrides (MXene) and the high-performance sensing effect of human skin including randomly distributed microstructural receptors, we fabricate a highly sensitive MXene-based piezoresistive sensor with bioinspired microspinous microstructures formed by a simple abrasive paper stencil printing process. The obtained piezoresistive sensor shows high sensitivity (151.4 kPa–1), relatively short response time (<130 ms), subtle pressure detection limit of 4.4 Pa, and excellent cycle stability over 10,000 cycles. The mechanism of the high sensitivity of the sensor is dynamically revealed from the structural perspective by means of in situ electron microscopy experiment and finite element simulation. Bioinspired microspinous microstructures can effectively improve the sensitivity of the pressure sensor and the limit of the detectable subtle pressure. In practice, the sensor shows great performance in monitoring human physiological signals, detecting quantitatively pressure distributions, and remote monitoring of intelligent robot motion in real time.
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