随时间变化的栅氧化层击穿
材料科学
栅氧化层
光电子学
MOSFET
击穿电压
功率MOSFET
电压
逻辑门
介电强度
氧化物
电气工程
功率半导体器件
功率(物理)
泄漏(经济)
可靠性(半导体)
阈值电压
电子工程
金属浇口
作者
Shin-Ichiro Hayashi,Keiji Wada
出处
期刊:International Power Electronics and Motion Control Conference
日期:2020-11-29
标识
DOI:10.1109/ipemc-ecceasia48364.2020.9367906
摘要
This paper proposes a gate-oxide Time-Dependent Dielectric Breakdown (TDDB) evaluation system for SiC power devices under switching operation conditions. A constant voltage High-Temperature Gate Bias (HTGB) test is often used for long-term reliability test of the gate-oxide TDDB of power devices. However, the test condition is different from an actual operation condition. In this paper, a TDDB evaluation circuit that can perform the gate-oxide HTGB test under the operating conditions of the power conversion circuit is described. Using the proposed test circuit, the TDDB evaluation of 1.2 kV Silicon Carbide (SiC) Metal-Oxide-Semiconductor-Field-Effect Transistors (MOSFETs) under switching conditions were performed.
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