On the Comparison of the Pseudo Rigid Body Model Method and the Finite Element Method for a 3DOF Planar Micro-Motion Stage

Abstract This paper discusses one type of commonly used parallel manipulator mechanism for the generation of micro-motion. This mechanism is designed as a compliant mechanism. The design and control of such a compliant mechanism is an important issue. This paper focuses on kinematic issues with consideration of future real-time control of the system. In particular, a constant-Jacobian method to approximate the kinematics, which is based on a pseudo rigid body model of the compliant mechanism, is further validated. This validation is based on the difference between this approximate method and the finite element method to the actual device, for an actuator range of 0–15 μm. The computational time with this approximate method is nearly 50 times less than that with the finite element method. It is expected that this approximation method will be far superior to the finite element method in terms of real-time control.