Spectroscopic Investigations and Thermoelectric Properties of RF-Sputtered ITO Thin Films

We have studied the structural, optical, electrical and thermoelectric properties of radio frequency (RF)-sputtered indium tin oxide (ITO) thin films, synthesized at room temperature on glass substrates. A target, containing 90 wt% of In2O3 and 10 wt% of SnO2, was used. The structure of ITO thin films was analyzed by x-ray diffraction (XRD) and x-ray reflectivity (XRR). Moreover, the electrical and optical properties were characterized by the four-point probe method and UV-Vis-NIR spectrometry, respectively. The effect of the RF power on the structural, optical, electrical, and thermoelectric properties showed that the prepared films are suitable as transparent conducting oxides in many applications.