退火(玻璃)
微观结构
材料科学
氟碳化合物
化学气相沉积
粒度
分析化学(期刊)
垂直的
化学工程
超导电性
矿物学
复合材料
光电子学
化学
凝聚态物理
有机化学
几何学
数学
工程类
物理
作者
Jing Zhao,Henry O. Marcy,Lauren M. Tonge,Bruce W. Wessels,Tobin J. Marks,Carl R. Kannewurf
标识
DOI:10.1016/0921-4534(89)91308-7
摘要
Single phase YBa2Cu3O7-δ films having zero resistance at 80–86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7−δ films having desirable superconducting properties.
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