The crystallization of Ba-ferrite/sapphire(001) films of various thicknesses has been studied using synchrotron x-ray scattering, field emission scanning electron microscope, and atomic force microscope. In films thinner than 1000 Å, Ba-ferrite amorphous precursor was crystallized into perpendicular grains keeping the magnetically easy c-axis normal to the film plane during annealing to 750 °C. In films thicker than 1000 Å, however, acicular grains keeping the c-axis parallel to the film plane were grown on top of the perpendicular grains. The behavior of the saturation magnetization and the intrinsic coercivity was consistent with the thickness dependence of the crystallization. We attribute the thickness dependence of the crystallization to the substrate effect, which prefers the growth of the epitaxial, c-axis oriented perpendicular grains near the film/substrate interfacial area.