深能级瞬态光谱
硅
材料科学
结晶学
电子束感应电流
Crystal(编程语言)
凝聚态物理
化学
光电子学
物理
计算机科学
程序设计语言
作者
Siwei Gao,Shuai Yuan,Zechen Hu,Peng Dong,Xiaodong Zhu,Deren Yang
标识
DOI:10.35848/1882-0786/abdcd3
摘要
Abstract Interactions of iron atoms with dislocations in n -type Czochralski silicon have been studied by combining deep level transient spectroscopy (DLTS) and electron beam induced current (EBIC). The EBIC results indicate that dislocations facilitate the aggregation of iron atoms. The DLTS reveals three levels K1 ( E c —0.17 eV), K2 ( E c —0.35 eV) and K3 ( E c —0.48 eV). The amplitudes of K2 and K3 peaks exhibit extended localized states. The origin of levels K2 and K3 is attributed to iron clusters around dislocations, and the existence of iron clusters in the vicinity of dislocations is further proved.
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