介质阻挡放电
聚二甲基硅氧烷
接触角
氦
材料科学
等离子体
氩
分析化学(期刊)
等离子清洗
表面粗糙度
粘附
电介质
化学
复合材料
光电子学
色谱法
物理
有机化学
量子力学
作者
Fellype do Nascimento,Sergio W. Parada,Stanislav A. Moshkalev,Munemasa Machida
标识
DOI:10.7567/jjap.55.021602
摘要
In this work we present some results of the treatment of polydimethylsiloxane (PDMS) surfaces using pulsed dielectric barrier discharge plasmas. The results of plasma treatment using different gases and mixtures, argon, argon plus water vapor, helium, helium plus water vapor, nitrogen and nitrogen plus water vapor, were compared testing the adhesion between two PDMS samples for each kind of plasma. We also studied the water contact angle in function of plasma process time of PDMS surfaces with each kind of plasma treatment. The plasma was characterized by optical emission spectroscopy (OES) to identify the emitting species and determine the plasma temperatures. The plasma temperature for each process was estimated comparing the spectrum obtained by OES with the spectrum generated by SpecAir simulation code. Measurements of power delivered to the plasmas were also performed. As the results, all the process using different gases show good adhesion efficacy between PDMS samples when long exposure time (larger than 150 seconds) is applied. However, when only a few discharges are applied to PDMS samples the helium plasma process presented best results. Atomic Force Microscopy (AFM) analysis of PDMS samples treated with helium plasma showed reduction in the surface roughness, which increase the surface contact area and improves the adhesion.
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