Research on technology of measuring and correcting the optical axis deviation of high-order aspheric lens

On the basis of optical theory, the mathematical model of axisymmetric high-order aspherical curve and the curve characteristic parameters related to the locus of aspherical surface are summarized. The non-contact precise measurement and correction of the central deviation of axisymmetric high-order aspherical lens based on autocollimated centering principle and spectral confocal displacement sensing technology are introduced. The methods of measuring the center deviation of aspheric lens with concave and convex surfaces are given. The aspheric measuring device of Trioptics double optical path center deviation measuring instrument is used to measure the axisymmetric high-order aspheric lens, Through several measurements and modifications, the final results meet the requirements of the whole optical system for the optical axis deviation of the axisymmetric high-order aspheric lens. The technology of measuring and correcting the center deviation of high-order aspheric lens with axial symmetry introduced in the paper has high non-contact measuring accuracy, which can guide the adjustment amount and position direction of the coincidence of the axis of symmetry and the axis of mechanical rotation of aspheric lens. It can be widely used in the process of on-line processing, testing and systematic adjustment of aspheric lens and aspheric mirror with different apertures. While ensuring the accuracy of aspheric surface, it can improve the quality of finish grinding process, save a lot of time for polishing process, and play a guiding role in its processing and manufacturing process and high-precision system installation, so as to greatly improve the processing efficiency of axisymmetric high-order aspheric surface and the final optical system installation and adjustment accuracy.