Control of the Surface Modification of Epoxy Resin by VUV-Reduction and VUV-Redox Method using Vacuum Ultraviolet Light

We evaluated the adhesion strength between epoxy and copper by applying vacuum ultraviolet light treatment to epoxy resin as a pretreatment for medium vacuum sputtering. In order to increase the concentration of hydroxyl groups on the resin surface, we replaced the VUV light irradiation atmosphere with a reducing gas and redox gas and evaluated the contact angle and adhesion. The VUV-Redox method generated COH groups on the epoxy resin surface, improving the adhesion strength at the interface between the epoxy resin and copper.