Artificial Intelligence End-to-End Workflow for Transmission Electron Microscopy: From Data Analysis Automation to Materials Knowledge Unveiling

This article introduces a groundbreaking analytical workflow designed for the holistic characterisation, modelling and physical simulation of device heterostructures. Our innovative workflow autonomously, comprehensively and locally characterises the crystallographic information and 3D orientation of the crystal phases, the elemental composition, and the strain maps of devices from (scanning) transmission electron microscopy data. It converts a manual characterisation process that traditionally takes days into an automatic routine completed in minutes. This is achieved through a physics-guided artificial intelligence model that combines unsupervised and supervised machine learning in a modular way to provide a representative 3D description of the devices, materials structures, or samples under analysis. To culminate the process, we integrate the extracted knowledge to automate the generation of both 3D finite element and atomic models of millions of atoms acting as digital twins, enabling simulations that yield essential physical and chemical insights crucial for understanding the device's behaviour in practical applications. We prove this end-to-end workflow with a state-of-the-art materials platform based on SiGe planar heterostructures for hosting coherent and scalable spin qubits. Our workflow connects representative digital twins of the experimental devices with their theoretical properties to reveal the true impact that every atom in the structure has on their electronic properties, and eventually, into their functional quantum performance. Notably, the versatility of our workflow is demonstrated through its successful application to a wide array of materials systems, device configurations and sample morphologies.