Influence of the shape of the cross-section of the blades on the pumping characteristics of a turbomolecular vacuum pump

The influence of the shape of the cross-section of the blades of a turbomolecular vacuum pump on its main characteristics in the mode of free molecular gas flow is considered. The possibility of a significant increase in the maximum ratio of pump pressures by modifying the cross-sectional shape of rotor and stator blades is shown. Keywords: turbomolecular vacuum pump, blade cross-sectional shape, Monte Carlo method, maximum speed of action, maximum pressure ratio. fominaim@bmstu.ru