Tuning Strain Sensor Performance via Programmed Thin-Film Crack Evolution

Stretchable strain sensors with well-controlled sensitivity and stretchability are crucial for applications ranging from large deformation monitoring to subtle vibration detection. Here, based on single-metal material on the elastomer and one-pot evaporation fabrication method, we realize controlled strain sensor performance via a novel programable cracking technology. Specifically, through elastomeric substrate surface chemistry modification, the microcrack generation and morphology evolution of the strain sensing layer is controlled. This process allows for fine tunability of the cracked film morphology, resulting in strain sensing devices with a sensitivity gauge factor of over 10 000 and stretchability up to 100%. Devices with a frequency response up to 5.2 Hz and stability higher than 1000 cycles are reported. The reported strain sensors, tracking both subtle and drastic mechanical deformations, are demonstrated in healthcare devices, human–machine interaction, and smart-home applications.