Micrograph contrast in low-voltage SEM and cryo-SEM

扫描电子显微镜 加速电压 材料科学 显微照片 分辨率(逻辑) 陶瓷 探测器 纳米技术 场电子发射 纳米材料 聚合物 光学 复合材料 阴极射线 电子 计算机科学 物理 人工智能 量子力学
作者
Lucy Liberman,Olga Kleinerman,Irina Davidovich,Yeshayahu Talmon
出处
期刊:Ultramicroscopy [Elsevier]
卷期号:218: 113085-113085 被引量:21
标识
DOI:10.1016/j.ultramic.2020.113085
摘要

Modern high-resolution scanning electron microscopes (SEM), equipped with field emission guns (FEGs), designed to operate at low acceleration voltage, have opened new opportunities to study conductive or insulating systems, without conductive coating. Better electron sources, optics, vacuum, and detectors allow high-resolution SEM to serve as a powerful characterization and analytical tool, and provide invaluable information about structure-property relations of nanomaterials and related applications. Slight specimen charging can be exploited to enhance contrast between different materials and phases, with minimum imaging artifacts. Optimization of charging effects and improved micrograph contrast are essential for the study of different-scale features in ceramics, polymers, organic materials, and thermally fixed liquids, including in biological research. The operating SEM parameters can be adjusted to a specific specimen based on prior knowledge of interaction of the electron beam with similar specimens, and the type of information one wishes to acquire. In this work we examined the effect of the acceleration voltage and the use of different detectors on the contrast formation in several types of specimens, focusing on materials formed mainly of carbon and oxygen, with low inherent contrast in the SEM. That includes cryogenic SEM (cryo-SEM) to study emulsions in their native state. We also studied by cryo-SEM carbon nanotubes (CNTs) dispersed in water and dissolved in superacid. HR-SEM at room temperature was performed on CNT films, deposited on glass. We show how micrograph contrast changes with different detectors, at different acceleration voltages. Judicious selection of the SEM operation parameters leads to optimal picture contrast between domains of different composition.
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