石墨烯
材料科学
剥脱关节
亚苯基
氧化物
化学气相沉积
电介质
单层
栅极电介质
氧化石墨烯纸
薄膜晶体管
纳米技术
光电子学
薄膜
晶体管
图层(电子)
聚合物
复合材料
电压
电气工程
冶金
工程类
作者
Alexey Lipatov,Benjamin B. Wymore,Alexandra Fursina,Timothy H. Vo,Alexander Sinitskii,Jody Redepenning
摘要
Site-directed electrochemical deposition of pinhole free, low-κ dielectric thin films on graphene is described for the first time. Specifically, we demonstrate the heterogeneous electrochemical polymerization of phenol to form thin (3–4 nm) layers of poly(phenylene oxide) (PPO) on monolayer graphene samples prepared by micromechanical exfoliation and chemical vapor deposition growth. We demonstrate the reliability of depositing PPO films simultaneously on a large number of devices, and selected individual graphene flakes/devices. The performance of top-gated field effect transistor devices described herein demonstrates the utility of electrodeposited PPO films as a top-gate dielectric.
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