聚乙烯亚胺
材料科学
相对湿度
晶体管
光电子学
场效应晶体管
湿度
泄漏(经济)
水蒸气
极化(电化学)
分析化学(期刊)
电气工程
电压
化学
色谱法
经济
转染
生物化学
有机化学
热力学
物理
基因
物理化学
宏观经济学
工程类
作者
Meile Wu,Zhanyu Wu,Yanna Zheng,Xiaoshi Jin,Xi Liu,Jong‐Ho Lee,Meng Li
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2021-11-29
卷期号:22 (1): 90-98
被引量:11
标识
DOI:10.1109/jsen.2021.3131196
摘要
In this paper, electrically insulating branched polyethylenimine (PEI) is applied to a field effect transistor (FET) sensor platform for low relative humidity (RH) detection (< 20%) at room temperature. The platform contains horizontally aligned control gate and floating gate, so that PEI is readily formed by simple ink-jet printing process. The electrical properties of the sensor in both dry and humid N 2 are measured. The subthreshold swing, gate leakage current, and off-state drain current are increased by water vapor adsorptions. The mechanism behind the phenomenon is deeply investigated by building an equivalent circuit model of the sensor and molecular simulations of water-vapor adsorptions on PEI. It could be due to the formation of the dipoles on the surface of the PEI layer by the adsorptions of water vapors via hydrogen bonding and the polarization of those dipoles by gate biases. The drain current increases with the rise of relative humidity levels and a relative high response of 137.6% is obtained corresponding to 17.8% RH. The novel sensing principle of the proposed sensor lead a high sensitivity, linearity and resolution to low RH below 20%. This research demonstrates a promising low humidity-level sensing capability of the proposed sensor and the study on the sensing principle is very useful for more gas-sensing applications of polymers based on FET platforms.
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