Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

材料科学 热流密度 散热片 焊剂(冶金) 热敏电阻器 热阻 热的 光电子学 微电子机械系统 脆化 绝热过程 温度测量 灵敏度(控制系统) 复合材料 核工程 传热 热力学 电气工程 电子工程 工程类 冶金 物理
作者
Le Li,Bian Tian,Zhongkai Zhang,Meng Shi,Jiangjiang Liu,Zhaojun Liu,Jiaming Lei,Shuimin Li,Qijing Lin,Libo Zhao,Zhuangde Jiang
出处
期刊:Microsystems & Nanoengineering [Springer Nature]
卷期号:9 (1) 被引量:4
标识
DOI:10.1038/s41378-023-00599-9
摘要

With the growing demand for thermal management of electronic devices, cooling of high-precision instruments, and biological cryopreservation, heat flux measurement of complex surfaces and at ultralow temperatures has become highly imperative. However, current heat flux sensors (HFSs) are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions, such as low sensitivity and embrittlement. In this study, we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures, ranging from -196 °C to 273 °C. The sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm, which are efficiently manufactured by the screen-printing method, reach 11.21 μV/(W/m2) and 13.43 μV/(W/m2), respectively. The experimental results show that there is a less than 3% resistance change from bending to stretching. Additionally, the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/m2. Additionally, we demonstrate the application of the HFS to the measurement of minuscule heat flux, such as heat dissipation of human skin and cold water. This technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces, which has great importance in the superconductor and cryobiology field.
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