All-dielectric ellipsoidal tetramer metasurface sensor with multi-resonances from the bound states in the continuum

We demonstrate an all-dielectric tetramer metasurface that achieves high-precision refractive index sensing through the excitation of toroidal dipole, magnetic dipole, and electric quadrupole modes, driven by bound states in the continuum (BIC). The metasurface exhibits exceptional performance, with a quality factor of 4.65 × 10 4 , a sensitivity parameter of 649 nm/RIU, and a figure of merit of 1.51 × 10 4 RIU −1 , achieved by optimizing symmetry and lattice perturbations in periodic silicon tetramer ellipsoidal nanodisks on a SiO 2 substrate. Additionally, the sensor effectively distinguishes analytes with extinction coefficient differences as small as 0.01 through enhanced broadband absorption. This innovation demonstrates substantial potential for label-free sensing applications in microfluidic chip integration.