Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water

原子层沉积 材料科学 无定形固体 氧化锡 X射线光电子能谱 退火(玻璃) 微晶 化学工程 椭圆偏振法 金红石 薄膜 氧化物 分析化学(期刊) 纳米技术 冶金 结晶学 化学 工程类 色谱法
作者
Marja N. Mullings,Carl Hägglund,Stacey F. Bent
出处
期刊:Journal of vacuum science & technology [American Vacuum Society]
卷期号:31 (6) 被引量:89
标识
DOI:10.1116/1.4812717
摘要

Due to the abundance and usefulness of tin oxide for applications such as transparent conductors, sensors, and catalysts, it is desirable to establish high quality atomic layer deposition (ALD) of this material. ALD allows for uniform, conformal coating of complex topographies with ultrathin films and can broaden the applicability of tin oxide to systems such as nanostructured solar cells. The present work examines the ALD of tin oxide by means of the precursor tetrakis(dimethylamino)tin and water as a counter-reactant. Low temperature growth in the range of 30–200 °C on Si(100) and glass substrates is studied. It is found that the growth rate increases with reduced temperature, up to ∼2.0 Å/cycle at 30 °C, as compared to 0.70 Å/cycle at 150 °C. The ALD process is established to be saturated even at the lowest temperature studied, for which the film contamination levels are below the detection limits of x-ray photoelectron spectroscopy. As-deposited films are smooth (rms roughness of 33 Å for a 460 Å thick film deposited on Si at 150 °C) and amorphous according to x-ray diffractometry. However, post-annealing to 600 °C in nitrogen leads to the formation of polycrystalline rutile SnO2. The optical constants obtained from variable angle spectroscopic ellipsometry suggest that as-deposited films have amorphous type bandgaps, which decrease with increasing temperature and film thickness. High quality, amorphous SnO2 films with moderately tunable optical properties are thus obtained by ALD at temperatures as low as 30 °C using a commercially available tin precursor and water.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
刚刚
FashionBoy应助落落采纳,获得10
1秒前
活力的青枫完成签到 ,获得积分10
1秒前
苏素肃发布了新的文献求助10
1秒前
2秒前
2秒前
3秒前
空禅yew发布了新的文献求助10
3秒前
汉堡包应助花开的声音1217采纳,获得10
3秒前
ying发布了新的文献求助10
3秒前
animenz完成签到,获得积分10
4秒前
tY发布了新的文献求助10
5秒前
OJL发布了新的文献求助10
5秒前
5秒前
5秒前
柒柒完成签到,获得积分10
5秒前
丘比特应助111采纳,获得10
6秒前
7秒前
7秒前
XShu完成签到,获得积分20
7秒前
xx完成签到 ,获得积分10
8秒前
羊知鱼完成签到,获得积分10
9秒前
公茂源发布了新的文献求助30
9秒前
搞怪不言发布了新的文献求助10
10秒前
DDDD完成签到,获得积分10
10秒前
陈莹发布了新的文献求助10
10秒前
执着的幻柏完成签到,获得积分10
10秒前
11秒前
11秒前
苏素肃完成签到,获得积分10
11秒前
隐形曼青应助sw98318采纳,获得10
12秒前
wangyanwxy发布了新的文献求助10
13秒前
13秒前
搜集达人应助WTF采纳,获得10
14秒前
Ava应助陆靖易采纳,获得10
14秒前
daishuheng完成签到 ,获得积分10
15秒前
OJL完成签到 ,获得积分10
16秒前
郑思榆完成签到 ,获得积分10
16秒前
wan完成签到 ,获得积分10
17秒前
cheney完成签到,获得积分10
18秒前
高分求助中
Continuum Thermodynamics and Material Modelling 3000
Production Logging: Theoretical and Interpretive Elements 2700
Social media impact on athlete mental health: #RealityCheck 1020
Ensartinib (Ensacove) for Non-Small Cell Lung Cancer 1000
Unseen Mendieta: The Unpublished Works of Ana Mendieta 1000
Bacterial collagenases and their clinical applications 800
El viaje de una vida: Memorias de María Lecea 800
热门求助领域 (近24小时)
化学 材料科学 生物 医学 工程类 有机化学 生物化学 物理 纳米技术 计算机科学 内科学 化学工程 复合材料 基因 遗传学 物理化学 催化作用 量子力学 光电子学 冶金
热门帖子
关注 科研通微信公众号,转发送积分 3527961
求助须知:如何正确求助?哪些是违规求助? 3108159
关于积分的说明 9287825
捐赠科研通 2805882
什么是DOI,文献DOI怎么找? 1540070
邀请新用户注册赠送积分活动 716926
科研通“疑难数据库(出版商)”最低求助积分说明 709808