Study of silicon carbide for X-ray detection and spectroscopy

碳化硅 半导体探测器 分辨率(逻辑) 物理 半最大全宽 探测器 X射线探测器 硅漂移探测器 光谱学 半导体 材料科学 分析化学(期刊) 光电子学 光学 计算机科学 化学 人工智能 量子力学 冶金 色谱法
作者
G. Bertuccio,R. Casiraghi
出处
期刊:IEEE Transactions on Nuclear Science [Institute of Electrical and Electronics Engineers]
卷期号:50 (1): 175-185 被引量:133
标识
DOI:10.1109/tns.2003.807855
摘要

This work presents an analysis of silicon carbide (SiC) as semiconductor for the realization of detectors for soft X-rays (<20 keV). On the basis of experimental data on prototype SiC junctions, the performance in X-ray spectroscopy using planar diode and drift detectors in SiC have been estimated in a wide range of operating temperature (up to 150°C). It has been derived that, due to their extremely low reverse current density (4.7 pA/cm 2 at 300 K and 17 pA/cm 2 at 340 K and at electric field of 100 kV/cm), SiC detectors can potentially reach superior performance with respect to all the other semiconductors presently employed at or above room temperature. In particular, a comparative theoretical analysis, based on experimental data on state-of-the-art silicon and SiC junctions, shows that SiC detectors with areas larger than 1 mm 2 have the potentiality to offer higher energy resolution when operating at temperature above 25°C. An energy resolution of about 700 and 1300 eV FWHM have been estimated for 1 mm 2 and 10 mm 2 SiC pad detectors operating at 100°C with a silicon front-end FET. The contribution of a standard silicon front-end electronics on the system performance has been analyzed. The open issues in SiC technology for X-ray detector development are highlighted.
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