电阻随机存取存储器
随机存取
电阻式触摸屏
计算机科学
随机存取存储器
计算机体系结构
计算机硬件
电气工程
计算机网络
工程类
操作系统
电压
作者
Shilong Zhu,Haixia Gao,Yiwei Duan,Yifan Bai,Xuan Qiu,Xiaohua Ma,Yintang Yang
标识
DOI:10.1002/pssa.202300964
摘要
Herein, a digital–analog hybrid resistive random‐access memory (RRAM) is prepared by integrating the structurally similar SiN x ‐based digital‐type RRAM with analog‐type RRAM by heterogeneous integration method. The Pt/SiN x /Ta/Ru is a digital RRAM due to the formation and breakage of the internal silicon dangling bonds conductive filaments, and the TiN/SiN x /Ta/Ru structure is an analog RRAM due to the traps‐filled limit region of the space‐charge limited current. The heterogeneously integrated digital RRAM has good cycling stability and endurance characteristics, and the heterogeneously integrated analog RRAM has high linearity and multistate counting characteristics. This heterogeneous integration approach is useful for the implementation of hybrid digital–analog RRAM.
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