电容感应
聚二甲基硅氧烷
标度系数
材料科学
制作
应变计
悬臂梁
弹性体
炭黑
有限元法
光电子学
电极
电子工程
复合材料
电气工程
工程类
结构工程
物理
医学
替代医学
天然橡胶
病理
量子力学
作者
V. Tsouti,Vasileios Mitrakos,Panagiotis Broutas,S. Chatzandroulis
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2016-05-01
卷期号:16 (9): 3059-3067
被引量:35
标识
DOI:10.1109/jsen.2016.2524508
摘要
The wide range of applications of strain sensors leads to an increased interest on flexible, cost effective, and low-power devices for strain and bending measurements. A simply structured sensor that meets these requirements is studied using a finite-element analysis. The sensor design focuses on the sensor performance variations for different applications and takes into account the fabrication process that can be used for elastomeric flexible sensors. Both large and small strain performance is considered. The simulation results are also compared with experimental measurements exploiting a flexible parallel plate capacitive strain sensor comprising carbon black-polydimethylsiloxane (PDMS) composite layers as electrodes and PDMS as the dielectric and encapsulation material. A simple and low-cost fabrication process was used, and the sensor was tested in a cantilever beam measurement setup. The device exhibits linear capacitive response (R 2 =0.999) and gauge factor 1.45 for small strain changes.
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