Performance improvement of red, green and blue InGaN micro-LEDs with distributed Bragg reflector

Abstract Red-green-blue (RGB) micro light-emitting diodes (micro-LEDs) without distributed Bragg reflector (DBR), with air-separating DBR, and with integrated DBR, were demonstrated. The effect of the DBRs as reflectors on the external quantum efficiency (EQE) and electroluminescence (EL) spectra enhancement of RGB micro-LEDs was systematically investigated for realizing higher-performance micro-LEDs for display applications. At 5 A/cm 2 , the EQEs of the RGB micro-LEDs with integrated DBR were improved by 38%, 33%, and 32%, respectively, with comparison to the RGB DBR free micro-LEDs. Further, the full width at half maximum (FWHM) of the red micro-LEDs was reduced by 4.3 nm at 50 A/cm 2 with the integrated DBR due to the higher enhancement of the central wavelength spectrum. The green and blue micro-LEDs with integrated DBR had higher EQE and the red micro-LEDs with integrated DBR had narrower FWHM compared to those with air-separating DBR. However, the peak wavelength of the RGB micro-LEDs with integrated DBR shifted, resulting in a lower color gamut in CIE 1931. The above work provides guidance for future full-color micro-display applications based on RGB InGaN micro-LED technology.