Effect of post-release sidewall morphology on the fracture and fatigue properties of polycrystalline silicon structural films

材料科学 多晶硅 表面粗糙度 氧化物 复合材料 表面光洁度 微电子机械系统 氧化硅 纳米技术 冶金 图层(电子) 薄膜晶体管 氮化硅
作者
Daan Hein Alsem,Brad Boyce,Christopher L. Muhlstein,Robert O. Ritchie
出处
期刊:Sensors and Actuators A-physical [Elsevier BV]
卷期号:147 (2): 553-560 被引量:30
标识
DOI:10.1016/j.sna.2008.05.027
摘要

Surface properties can markedly affect the mechanical behavior of structural thin films used in microelectromechanical systems (MEMS) applications. This study highlights the striking difference in the sidewall surface morphology of n+-type polysilicon films from two popular MEMS processes and its effect on fracture and fatigue properties. The sidewall surface roughness was measured using atomic force microscopy, whereas silicon oxide thickness and grain size were measured using (energy-filtered) transmission electron microscopy. These measurements show that the oxide layers are not always thin native oxides, as often assumed; moreover, the roughness of the silicon/silicon oxide interface is significantly influenced by the oxidation mechanism. Thick silicon oxides (20 ± 5 nm) found in PolyMUMPs™ films are caused by galvanic corrosion from the presence of gold on the chip, whereas in SUMMiT V™ films a much thinner (3.5 ± 1.0 nm) native oxide was observed. The thicker oxide layers, in combination with differences in sidewall roughness (14 ± 5 nm for PolyMUMPs™ and 10 ± 2 nm for SUMMiT V™), can have a significant effect on the reliability of polysilicon structures subjecting to bending loads; this is shown by measurements of the fracture strength (3.8 ± 0.3 GPa for PolyMUMPs™ and 4.8 ± 0.2 GPa for SUMMiT V™) and differences in the stress-lifetime cyclic fatigue behavior.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
西南楚留香完成签到,获得积分10
刚刚
Newky发布了新的文献求助10
1秒前
3秒前
3秒前
王路飞完成签到,获得积分10
4秒前
7秒前
mmm发布了新的文献求助10
8秒前
boltos发布了新的文献求助10
10秒前
ASA完成签到,获得积分10
10秒前
abin发布了新的文献求助10
11秒前
Newky完成签到,获得积分10
11秒前
卿君完成签到,获得积分10
15秒前
15秒前
Jasper应助乔佳怡采纳,获得10
17秒前
Akim应助hwezhu采纳,获得10
17秒前
18秒前
alpv完成签到,获得积分10
18秒前
19秒前
南冥发布了新的文献求助10
22秒前
22秒前
23秒前
迷路的绿藻头完成签到 ,获得积分10
23秒前
量子星尘发布了新的文献求助10
24秒前
哈哈完成签到,获得积分10
24秒前
A阿澍发布了新的文献求助10
25秒前
abin完成签到,获得积分10
25秒前
27秒前
27秒前
27秒前
hwezhu发布了新的文献求助10
28秒前
30秒前
jyy应助科研通管家采纳,获得10
32秒前
czh应助科研通管家采纳,获得20
32秒前
烟花应助科研通管家采纳,获得10
33秒前
充电宝应助科研通管家采纳,获得10
33秒前
小马甲应助科研通管家采纳,获得10
33秒前
33秒前
今后应助科研通管家采纳,获得10
33秒前
33秒前
无花果应助科研通管家采纳,获得10
33秒前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
ACSM’s Guidelines for Exercise Testing and Prescription, 12th edition 500
‘Unruly’ Children: Historical Fieldnotes and Learning Morality in a Taiwan Village (New Departures in Anthropology) 400
Indomethacinのヒトにおける経皮吸収 400
Phylogenetic study of the order Polydesmida (Myriapoda: Diplopoda) 370
基于可调谐半导体激光吸收光谱技术泄漏气体检测系统的研究 350
Robot-supported joining of reinforcement textiles with one-sided sewing heads 320
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3989263
求助须知:如何正确求助?哪些是违规求助? 3531418
关于积分的说明 11253814
捐赠科研通 3270066
什么是DOI,文献DOI怎么找? 1804884
邀请新用户注册赠送积分活动 882084
科研通“疑难数据库(出版商)”最低求助积分说明 809136