Abstract Ordered arrays of luminescent YVO 4 :Eu 3+ films with square (side length 19.17 ± 2.05 μm) and dot (diameter 11.20 ± 1.82 μm) patterns were fabricated by two kinds of soft lithography processes, namely, microtransfer molding (μTM) and microcontact printing (μCP), respectively. Both soft‐lithography processes utilize a PDMS elastomeric mold as the stamp combined with a Pechini‐type sol‐gel process to produce luminescent patterns on quartz plates, in which a YVO 4 :Eu 3+ precursor solution was employed as ink. The ordered luminescent YVO 4 :Eu 3+ patterns are revealed by optical microscopy and their microstructure, consisting of nanometer‐scale particles, is unveiled by scanning electronic microscopy (SEM) observations. Additionally, photoluminescence (PL) and cathodoluminescence (CL) were carried out to characterize the patterned YVO 4 :Eu 3+ samples. A strong red emission as a result of 5 D 0 – 7 F 2 transition of Eu 3+ was observed under UV‐light or electron‐beam excitation, which implies that combining soft lithography with a Pechini‐type sol‐gel route has potential for fabricating rare‐earth luminescent pixels for next‐generation field‐emission display devices.