光电子学
光电探测器
材料科学
石墨烯
电容感应
带隙
电容
电极
光电二极管
透射率
电阻式触摸屏
半导体
光学
纳米技术
物理
电气工程
工程类
量子力学
作者
Ayeong Kim,Geonyeop Lee,Jihyun Kim
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2021-08-26
卷期号:39 (5)
被引量:3
摘要
Conventional solar-blind photodetectors based on the conduction of photoexcited carriers are energy inefficient owing to the power dissipation caused by a resistive sensing mechanism and the narrow bandgap energy of the photon-absorbing layer. Herein, we demonstrate the energy-efficient capacitive sensing of deep-UV wavelengths by integrating an intrinsically solar-blind ultrawide bandgap (UWBG) β-Ga2O3 semiconductor with UV-transparent and conductive graphene electrode. A UWBG β-Ga2O3 eliminates the requirement of a solar-blind deep-UV bandpass filter. The high optical transmittance of the graphene enables UV-C light to be absorbed in the underlying β-Ga2O3, thereby facilitating carrier transport between the graphene electrode and β-Ga2O3. A capacitance change under UV-C excitation is observed, along with excellent reproductivity and spectral selectivity at various frequencies and bias conditions; the sensing performance improves with an increase in frequency. The average power dissipation of the fabricated photodetector in the stand-by (dark) and active (UV-C illumination) modes is 37.7 and 53.3 μW, respectively. Overall, this work introduces a new strategy for developing next-generation compact and energy-efficient solar-blind photodetectors.
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