Miniaturized electromechanical devices with multi-vibration modes achieved by orderly stacked structure with piezoelectric strain units

压电 压电马达 超声波电动机 锆钛酸铅 材料科学 振动 PMUT公司 压电系数 声学 压电加速度计 定子 压电传感器 纳米发生器 光电子学 复合材料 机械工程 物理 铁电性 工程类 电介质
作者
Jinfeng Liu,Xiangyu Gao,Haiyun Jin,Kaile Ren,Jingyu Guo,Liao Qiao,Chaorui Qiu,Wei Chen,Yan He,Shuxiang Dong,Chao Wang,Fēi Li
出处
期刊:Nature Communications [Springer Nature]
卷期号:13 (1) 被引量:13
标识
DOI:10.1038/s41467-022-34231-7
摘要

Piezoelectric devices based on a variety of vibration modes are widely utilized in high-tech fields to make a conversion between mechanical and electrical energies. The excitation of single or coupled vibration modes of piezoelectric devices is mainly related to the structure and property of piezoelectric materials. However, for the generally used piezoelectric materials, e.g., lead zirconate titanate ceramics, most of piezoelectric coefficients in the piezoelectric matrix are equal to zero, resulting in many piezoelectric vibration modes cannot be excited, which hinders the design of piezoelectric devices. In this work, an orderly stacked structure with piezoelectric strain units is proposed to achieve all nonzero piezoelectric coefficients, and consequently generate artificially coupled multi-vibration modes with ultrahigh strains. As an example, an orderly stacked structure with two piezoelectric strain units stator, corresponding to 31-36 coupled vibration mode, was designed and fabricated. Based on this orderly stacked structure with two piezoelectric strain units stator, we made a miniature ultrasonic motor (5 mmLength × 1.3 mmHeight × 1.06 mmWidth). Due to the ultrahigh strain of the 31-36 coupled vibration mode, the velocity per volume of the motor reached 4.66 s-1 mm-2. Furthermore, its moving resolution is around 3 nm, which is two orders higher than that of other piezoelectric motors. This work sheds a light on optimizing the performance of state-of-the-art electromechanical devices and may inspire new devices based on multi-vibration modes.
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