Abstract Perovskite solar cells are considered next‐generation photovoltaic technology due to their remarkable advancements in power conversion efficiency. To transition this technology from the lab to industry, the method for preparing perovskite thin films must support mass production. Currently, the solution‐based slot‐die technique is the primary method for depositing large‐area perovskite thin films. However, solution‐based methods are not standard in the semiconductor industry, where vapor‐based techniques are favored for their high controllability and reproducibility. The cost of vacuum facilities and the complexity of these processes hinder many researchers, resulting in vapor‐based technique development lagging behind solution‐based methods in device efficiency and scale. This review focuses on the progress in growing perovskite thin films using vapor–solid reaction techniques, which are believed to offer the most direct path to commercialization. By examining the crystallization and growth mechanisms of perovskite films and discussing specific optimization strategies for vapor–solid reactions, insights into future developments and challenges in fabricating perovskite solar cells using fully vacuum processes are concluded.