Two-dimensional van der Waals heterostructure for ultra-sensitive nanoelectromechanical piezoresistive pressure sensing

Micro electromechanical systems (MEMS) micro-pressure sensors have wide applications in consumer electronics, industrial monitoring, and biomedicine. However, as the next-generation portable and wearable devices bloom in recent years, existing design of pressure sensors faces great challenges to break the trade-off between the sensitivity and nonlinearity in the miniaturization process. Here, we report a sandwich-like Graphene/h-BN/Graphene-resistor heterostructure sensing element for micro-pressure detection. This novel design decouples pressure-to-strain translation process and strain-to-electrical signal sensing process by the insulation of bottom graphene structure layer and top graphene piezoresistive layer. We reveal the effects of the heterostructure dimensions, layer number and pretension on the mechanical performance utilizing finite element method (FEM) simulation, and propose the design principle of the piezoresistors and patterning strategy of the heterostructure. Remarkably, the heterostructure exhibits ultra-high sensitivity per unit area, outperforming state-of-art graphene and silicon-based sensors by up to five orders of magnitude, as well as a significant reduction of the nonlinearity. Our work shows tremendous potential of 2D material heterostructure as a promising platform to break the miniaturization limitation of ultrasensitive pressure sensors.